The Observation of Local Electric Fields in GaN/AlGaN/InGaN Multi-heterostructures by Differential Phase Contrast STEM
Abstract
The local electric field distributions inside specimens can be directly observed by differential-phase-contrast scanning transmission electron microscopy (DPC STEM). In this study, we applied DPC STEM to GaN/AlGaN/InGaN multi-heterostructures. We successfully visualized the differences in electrostatic potentials of GaN/AlGaN/InGaN.
- Author
-
- Satoko Toyama *
- Takehito Seki *
- Yuya Kanitani
- Shigetaka Tomiya
- Yuichi Ikuhara *
- Naoya Shibata *
- Company
- Sony Group Corporation
- Conference
- IEEJ
- Year
- 2022
