3D integrated 2D addressable VCSEL array with highly uniform short pulse characteristics

Abstract

We demonstrate a 3D integrated 2D addressable VCSEL array that integrates high power 2D VCSEL array on a circuit board with a built-in laser driver by flip-chip bonding, resulting in high optical power density of 1,500 W/mm2 and short pulse duration of 2 ns. Compared to our previous report at PW2023, the optical output power is improved from 45 to 80W/channel. The optical pulse shape has short rise time 1 ns and a narrow pulse width of 2 ns, and highly uniform optical pulse shape was observed in the plane. We also report some reliability test results.

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