A Challenge for 3μm SPAD Pixel Using Embedded Metal Contact on Deep Trench Pixel Isolation

Abstract

We demonstrate photon-counting operation with a 3.06-μm-pitch SPAD pixel by using the embedded metal contact in the pixel. The peak PDE through the green color filter is 57 % and the DCR is 15.8 cps with 20.9 V of Vbd and 3 V of Vex. In addition, cross talk probability is less than 0.4 % because of full trench isolation with metal light shielding. The PDE obtained is significantly higher than those in previous works with equal or smaller than 5-μm-pitch pixels, and the DCR is comparable to those in previous works with 6-μm-pitch pixels.

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